Ultra-high on-chip optical gain in erbium-based hybrid slot waveguides

Ultra-high on-chip optical gain in erbium-based hybrid slot waveguides

Ultra-high on-chip optical gain in erbium-based hybrid slot waveguides, Published online: 25 January 2019; doi:10.1038/s41467-019-08369-w

Realizing efficient on-chip amplification in silicon is challenging due to either non-compatible integration or small gain per unit length of the amplifier material. Here, the authors report ultra-high on-chip optical gain in erbium-based hybrid silicon nitride slot waveguides with a monolithic, CMOS-compatible and scalable atomic-layer deposition process.

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