Experimental realization of on-chip topological nanoelectromechanical metamaterials

Experimental realization of on-chip topological nanoelectromechanical metamaterials

Experimental realization of on-chip topological nanoelectromechanical metamaterials, Published online: 12 December 2018; doi:10.1038/s41586-018-0764-0

Topological nanoelectromechanical metamaterials are realized at the micrometre scale, using silicon nitride nanomembranes, opening the way for on-chip integrated acoustic components in high-frequency signal-processing applications.

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